Rethinking data-driven point spread function modeling with a differentiable optical model

Modeling of EUV photoresists with a resist point spread function

Extreme ultraviolet (EUV) lithography is under development for possible deployment at the 32-nm technology node. One active area of research in this field is the development of photoresists that can meet the stringent requirements (high resolution, high sensitivity, low LER, etc.) of lithography in this regime. In order to facilitate research in this and other areas related to EUV lithography, ...

Point spread function of the optical needle super-oscillatory lens

Point spread function based image reconstruction in optical projection tomography.

As a result of the shallow depth of focus of the optical imaging system, the use of standard filtered back projection in optical projection tomography causes space-variant tangential blurring that increases with the distance to the rotation axis. We present a novel optical tomographic image reconstruction technique that incorporates the point spread function of the imaging lens in an iterative ...

Estimation of the ocular point spread function by retina modeling.

Retinal imaging often suffers from blurring aberrations. With knowledge of the blurring point spread function (PSF), better images can be reconstructed by deconvolution techniques. We demonstrate a method to enhance the contrast of retinal cells by estimating the ocular PSF. This is done by finding the cells' positions and their intensity distributions and using these as a model for the image. ...

Modeling the point-spread function in helium-ion lithography.

We present here a hybrid approach to modeling helium-ion lithography that combines the power and ease-of-use of the Stopping and Range of Ions in Matter (SRIM) software with the results of recent work simulating secondary electron (SE) yield in helium-ion microscopy. This approach traces along SRIM-produced helium-ion trajectories, generating and simulating trajectories for SEs using a Monte Ca...